Improved infrared thermal imaging of a CMOS MEMS device.

Date

2010

Advisors

Journal Title

Journal ISSN

ISSN

DOI

Volume Title

Publisher

IEEE

Type

Conference

Peer reviewed

Abstract

Description

Keywords

Citation

Hopper, R.H. et al. (2010) Improved infrared thermal imaging of a CMOS MEMS device. 16th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2010, pp. 122-126.

Rights

Research Institute