A novel method for the growth of low temperature silicon structures for 3-D flash memory devices
Date
2009
Advisors
Journal Title
Journal ISSN
ISSN
Volume Title
Publisher
ECS Transactions
Type
Conference
Peer reviewed
Yes
Abstract
Description
Keywords
Citation
Mih, T.A., Cross, R.B.M. and Paul, S. (2009) A novel method for the growth of low temperature silicon structures for 3-D flash memory devices. MRS Proceedings, 1112, pp. 265-269.