A novel method for the growth of low temperature silicon structures for 3-D flash memory devices

Date

2009

Advisors

Journal Title

Journal ISSN

ISSN

Volume Title

Publisher

ECS Transactions

Type

Conference

Peer reviewed

Yes

Abstract

Description

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Citation

Mih, T.A., Cross, R.B.M. and Paul, S. (2009) A novel method for the growth of low temperature silicon structures for 3-D flash memory devices. MRS Proceedings, 1112, pp. 265-269.

Rights

Research Institute