Infra-Red Thermal Measurement on a Low Power Infra-Red Emitter in CMOS Technology

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dc.cclicenceCC-BY-NCen
dc.contributor.authorPandey, P.en
dc.contributor.authorOxley, C.en
dc.contributor.authorHopper, Richarden
dc.contributor.authorAli, Z.en
dc.contributor.authorDuffy, A. P.en
dc.date.acceptance2018-08-07en
dc.date.accessioned2018-08-08T14:52:08Z
dc.date.available2018-08-08T14:52:08Z
dc.date.issued2019-01-17
dc.descriptionThe file attached to this record is the author's final peer reviewed version.en
dc.description.abstractThis paper presents high temperature characterisation of a novel infra-red (IR) emitter chip based on CMOS technology, using IR thermal microscopy. The performance and reliability of the thermal source is highly dependent on the operating temperature and temperature uniformity across the micro-heater which is embedded within the silicon dioxide membrane. To date, the accuracy of the IR measurement has been limited by the optical transparency of the semiconductor material forming the membrane, which has poor emissivity compared to a black-body source. In this paper, a high emissivity micro-particle sensor is used improve the accuracy of the temperature measurements. IR measurements on the emitter chip were validated with reference to temperature measurements made using an electrical technique where good temperature uniformity across the membrane heater was found.en
dc.funderN/Aen
dc.identifier.citationPandey, P., Oxley, C., Hopper, R., Ali, Z., Duffy; A. (2018) Infra-Red Thermal Measurement on a Low Power Infra-Red Emitter in CMOS Technology. IET Science, Measurement and Technology, 13 (1), pp. 25-28en
dc.identifier.doihttps://doi.org/10.1049/iet-smt.2018.5427
dc.identifier.issn1751-8822
dc.identifier.urihttp://hdl.handle.net/2086/16447
dc.language.isoenen
dc.peerreviewedYesen
dc.projectidN/Aen
dc.publisherIETen
dc.researchgroupInstitute of Energy and Sustainable Developmenten
dc.researchinstituteInstitute of Engineering Sciences (IES)en
dc.subjectThermal measurementen
dc.subjectir microscopyen
dc.subjectmicroparticleen
dc.subjecthigh temperatureen
dc.titleInfra-Red Thermal Measurement on a Low Power Infra-Red Emitter in CMOS Technologyen
dc.typeArticleen

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