Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices.
Date
2010-04
Advisors
Journal Title
Journal ISSN
ISSN
0957-0233
Volume Title
Publisher
IOP
Type
Article
Peer reviewed
Abstract
Description
Keywords
Citation
Hopper, R.H. et al. (2010) Use of carbon micro-particles for improved infrared temperature measurement of CMOS MEMS devices. Measurement, science and technology, 21 (4), pp. 045107