Use of Carbon Micro-particles for improved IR surface temperature measurements of CMOS MEMs Devices
Date
2010-04
Advisors
Journal Title
Journal ISSN
ISSN
Volume Title
Publisher
Type
Article
Peer reviewed
Abstract
Description
Keywords
Citation
Hopper, R.H. et al. (2010) Use of Carbon Micro-particles for improved IR surface temperature measurements of CMOS MEMs Devices. IOP Measurement Science and Technology, 21 (4) 045107