Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics
dc.contributor.author | Al-Kuzee, J. | |
dc.contributor.author | Matsuura, T. | |
dc.contributor.author | Goodyear, A. | |
dc.contributor.author | Nolle, L. | |
dc.contributor.author | Hopgood, Adrian A. | |
dc.contributor.author | Picton, P. D. | |
dc.contributor.author | Braithwaite, Nicholas (Nicholas St. J.) | |
dc.date.accessioned | 2009-02-27T13:18:32Z | |
dc.date.available | 2009-02-27T13:18:32Z | |
dc.date.issued | 2004 | |
dc.identifier.citation | Al-Kuzee, J., Matsuura, T., Goodyear, A.,Nolle, L., Hopgood, A.A., Picton, P..D. and Braithwaite N.S. (2004) Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics. Plasma Sources Science and Technology, 13 , pp 612 - 622 | en |
dc.identifier.doi | https://doi.org/10.1088/0963-0252/13/4/010 | |
dc.identifier.issn | 0963-0252 | |
dc.identifier.uri | http://hdl.handle.net/2086/983 | |
dc.language.iso | en | en |
dc.researchgroup | Centre for Computational Intelligence | |
dc.title | Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics | en |
dc.type | Article | en |