Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics

dc.contributor.authorAl-Kuzee, J.
dc.contributor.authorMatsuura, T.
dc.contributor.authorGoodyear, A.
dc.contributor.authorNolle, L.
dc.contributor.authorHopgood, Adrian A.
dc.contributor.authorPicton, P. D.
dc.contributor.authorBraithwaite, Nicholas (Nicholas St. J.)
dc.date.accessioned2009-02-27T13:18:32Z
dc.date.available2009-02-27T13:18:32Z
dc.date.issued2004
dc.identifier.citationAl-Kuzee, J., Matsuura, T., Goodyear, A.,Nolle, L., Hopgood, A.A., Picton, P..D. and Braithwaite N.S. (2004) Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics. Plasma Sources Science and Technology, 13 , pp 612 - 622en
dc.identifier.doihttps://doi.org/10.1088/0963-0252/13/4/010
dc.identifier.issn0963-0252
dc.identifier.urihttp://hdl.handle.net/2086/983
dc.language.isoenen
dc.researchgroupCentre for Computational Intelligence
dc.titleOptimization of plasma etch processes using evolutionary search methods with in situ diagnosticsen
dc.typeArticleen

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