Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics
Date
2004
Advisors
Journal Title
Journal ISSN
ISSN
0963-0252
Volume Title
Publisher
Type
Article
Peer reviewed
Abstract
Description
Keywords
Citation
Al-Kuzee, J., Matsuura, T., Goodyear, A.,Nolle, L., Hopgood, A.A., Picton, P..D. and Braithwaite N.S. (2004) Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics. Plasma Sources Science and Technology, 13 , pp 612 - 622