Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors

Date

2012

Authors

Milanov, Andrian P.
Xu, Ke
Cwik, Stefan
Parala, Harish
De Los Arcos, T.
Becker, Hans-Werner
Rogalla, Detlef
Cross, R. B. M.
Paul, Shashi
Devi, Anjana

Advisors

Journal Title

Journal ISSN

ISSN

1477-9226

DOI

https://doi.org/10.1039/C2DT31219K

Volume Title

Publisher

Royal Society of Chemistry

Type

Article

Peer reviewed

Yes

Abstract

Description

Keywords

Citation

Milanov, A.P. et al (2012) Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors. Dalton Transactions, 45, pp. 13936-13947

URI

http://hdl.handle.net/2086/8457

Rights

Research Institute

Collections

School of Engineering and Sustainable Development