Effect of DC self-bias on the adhesion of diamond-like carbon deposited on metal tracks by RF-PECVD

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dc.contributor.authorPaul, Shashien
dc.date.accessioned2015-03-25T14:02:03Z
dc.date.available2015-03-25T14:02:03Z
dc.date.issued2006-07
dc.description.abstractThe adhesion and material properties of diamond-like carbon (DLC), deposited by the radio-frequency plasma enhanced chemical vapour deposition technique, can be significantly affected by the substrate material on which the film is deposited and by the substrate topography. These issues have serious implications for applications in electronic devices and hard coating in small areas. We have investigated the adhesion of the diamond-like carbon films to Si substrates characterised by varying degrees of metal coverage. The deposited DLC films were studied at different DC self-bias values. This investigation demonstrates the dependence of the adherence of the DLC films to the metal tracks on the imposed the DC self-bias.en
dc.fundernoneen
dc.identifier.citationPaul, S. (2006) Effect of DC self-bias on the adhesion of diamond-like carbon deposited on metal tracks by RF-PECVD. IEE Proceedings Science, Measurement and Technology, 153 (4), pp. 164-167en
dc.identifier.doihttps://doi.org/10.1049/ip-smt:20060006
dc.identifier.urihttp://hdl.handle.net/2086/10835
dc.language.isoenen
dc.peerreviewedYesen
dc.projectidn.aen
dc.researchgroupEmerging Technologies Research Centreen
dc.researchinstituteInstitute of Engineering Sciences (IES)en
dc.subjectAdhesionen
dc.subjectDepositionen
dc.subjectElectronic equipmenten
dc.subjectPlasma enhanced chemical vapor depositionen
dc.subjectSurface topographen
dc.titleEffect of DC self-bias on the adhesion of diamond-like carbon deposited on metal tracks by RF-PECVDen
dc.typeArticleen

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