Low temperature growth of silicon structures for application in flash memory devices.

Date

2010

Advisors

Journal Title

Journal ISSN

ISSN

0272-9172

DOI

Volume Title

Publisher

Type

Conference

Peer reviewed

Abstract

Description

Keywords

Citation

Mih, T.A., Paul, S. and Cross, R.B.M. (2010) Low temperature growth of silicon structures for application in flash memory devices. Materials Research Society Symposium, 1250, pp. 9-14

Rights

Research Institute

Institute of Engineering Sciences (IES)