Low temperature growth of silicon structures for application in flash memory devices.
Date
2010
Advisors
Journal Title
Journal ISSN
ISSN
0272-9172
DOI
Volume Title
Publisher
Type
Conference
Peer reviewed
Abstract
Description
Keywords
Citation
Mih, T.A., Paul, S. and Cross, R.B.M. (2010) Low temperature growth of silicon structures for application in flash memory devices. Materials Research Society Symposium, 1250, pp. 9-14