Experimental study of mobility degradation in ultrathin high-κ based MOSFETs.
Date
2010
Authors
Advisors
Journal Title
Journal ISSN
ISSN
0038-1101
Volume Title
Publisher
IEEE
Type
Article
Peer reviewed
Yes
Abstract
Description
Keywords
Citation
Atarah, S.A. (2010) Experimental study of mobility degradation in ultrathin high-κ based MOSFETs. Solid State Electronics, 55 (1), pp. 44-48