Intelligent control of low pressure plasma processing.

Date

2003

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Peer reviewed

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Citation

Al-Kuzee, J.;Matsuura, T.; Goodyer, A.;Nolle, L.;Hopgood, A. A.;Picton, P. D.;Braithwaite, N. S. (2003) Intelligent control of low pressure plasma processing. 29th Annual Conference of the IEEE Industrial Electronics Society (IECON\'03), 2 , pp. 1932 - 1937

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Research Institute