Browsing by Author "Matsuura, T."
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Item Metadata only Intelligent control of low pressure plasma processing.(2003) Al-Kuzee, J.; Matsuura, T.; Hopgood, Adrian A.; Nolle, L.; Goodyear, A.; Picton, P. D.; Braithwaite, Nicholas (Nicholas St. J.)Item Metadata only Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics(2004) Al-Kuzee, J.; Matsuura, T.; Goodyear, A.; Nolle, L.; Hopgood, Adrian A.; Picton, P. D.; Braithwaite, Nicholas (Nicholas St. J.)